Modelling of Microfabrication Systems Rutilius Taurus Aemilianus with some difficult passages removed
Description
with some difficult passages removed
' n a c h man n in vielen Fallen zur Orientierung willkommen sein wird
Erschwert wird dies bei Beauftragungsmodellen
denn die Beauftragung einer Leistung impliziert bereits
Modelling of Microfabrication Systems Rutilius Taurus Aemilianus with some difficult passages removedThis is the first book to address modelling of systems that are important to the fabrication of three dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x ray lithography.
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