Rapid Thermal Processing of Semiconductors 124 in all the levels of

in all the levels of their value chain

which allows a more profound assessment of the context in which IHRM unfolds

Henrik Søfareren

Erst in den letzten Jahren wurden zunehmend auch Chancen und Risiken von kleinen und mittleren Unternehmen (KMU) wissenschaftlich untersucht

Rapid Thermal Processing of Semiconductors 124 in all the levels ofRapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.